Marc M. J. van de Wal

18 papers C 9Journal 5Unranked 4

Year	Rank	Type	Title / Venue / Authors
2025	—	`conf`	Optimal Co-Design of Sensor Placement and State Observer for Lithography Applications. CCTA R. P. P. F. Goetz, Nathan van de Wouw, Tom Oomen, Marc M. J. van de Wal, Bardia Sharif, Hans J. Zwart
2021	J	`jnl`	Optimal Thermal Actuation for Mitigation of Heat-Induced Wafer Deformation. IEEE Trans. Control. Syst. Technol. Daniel W. M. Veldman, Rob H. B. Fey, Hans Zwart, Marc M. J. van de Wal, Joris D. B. J. van den Boom, Henk Nijmeijer
2020	J	`jnl`	Sensor and Actuator Placement for Proportional Feedback Control in Advection-Diffusion Equations. IEEE Control. Syst. Lett. Daniel W. M. Veldman, Rob H. B. Fey, Hans J. Zwart, Marc M. J. van de Wal, Joris D. B. J. van den Boom, Hendrik Nijmeijer
2019	C	`conf`	Optimal actuator shape design with input and state constraints for a wafer heating application. ACC Daniel W. M. Veldman, Rob H. B. Fey, Hans J. Zwart, Marc M. J. van de Wal, Joris D. B. J. van den Boom, Henk Nijmeijer
2016	C	`conf`	Frequency Response Sensitivity model updating using generic parameters. ACC M. Dorosti, F. J. M. Heck, Rob H. B. Fey, Marcel François Heertjes, Marc M. J. van de Wal, Henk Nijmeijer
2014	J	`jnl`	Connecting System Identification and Robust Control for Next-Generation Motion Control of a Wafer Stage. IEEE Trans. Control. Syst. Technol. Tom Oomen, Robbert van Herpen, Sander Quist, Marc M. J. van de Wal, Okko H. Bosgra, Maarten Steinbuch
2014	C	`conf`	Exploiting additional actuators and sensors for nano-positioning robust motion control. ACC Robbert van Herpen, Tom Oomen, Edward Kikken, Marc M. J. van de Wal, Wouter H. T. M. Aangenent, Maarten Steinbuch
2013	C	`conf`	Enhancing performance through multivariable weighting function design in ℋ- loop-shaping: with application to a motion system. ACC Frank Boeren, Robbert van Herpen, Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra
2012	C	`conf`	Next-generation wafer stage motion control: Connecting system identification and robust control. ACC Tom Oomen, Robbert van Herpen, Sander Quist, Marc M. J. van de Wal, Okko H. Bosgra, Maarten Steinbuch
2010	C	`conf`	Experimental evaluation of robust-control-relevance: A confrontation with a next-generation wafer stage. ACC Robbert van Herpen, Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra
2009	—	`conf`	Identification for robust inferential control. CDC Tom Oomen, Okko H. Bosgra, Marc M. J. van de Wal
2007	C	`conf`	Aliasing of Resonance Phenomena in Sampled-Data Feedback Control Design: Hazards, Modeling, and a Solution. ACC Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra
2007	J	`jnl`	Design framework for high-performance optimal sampled-data control with application to a wafer stage. Int. J. Control Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra
2006	C	`conf`	Exploiting H∞ Sampled-Data Control Theory for High-Precision Electromechanical Servo Control Design. ACC Tom Oomen, Marc M. J. van de Wal, Okko H. Bosgra
2004	—	`conf`	Multi-objective H CDC M. J. Zandvliet, Carsten W. Scherer, Camile W. J. Hol, Marc M. J. van de Wal
2003	C	`conf`	Model-based feedforward for motion systems. CCA Matthijs Boerlage, Maarten Steinbuch, Paul F. Lambrechts, Marc M. J. van de Wal
2001	J	`jnl`	A review of methods for input/output selection. Autom. Marc M. J. van de Wal, Bram de Jager
2001	—	`conf`	Experimentally validated multivariable μ feedback controller design for a high-precision wafer stage. CDC Marc M. J. van de Wal, Gregor van Baars, Frank Sperling, Okko H. Bosgra