Fazhi Song

13 papers Journal 12Unranked 1
YearRankTypeTitle / Venue / Authors
2025 J jnl
Beyond Performance of Learning Control Subject to Uncertainties and Noise: A Frequency-Domain Approach Applied to Wafer Stages.
IEEE CAA J. Autom. Sinica
Fazhi Song, Ning Cui, Shuaiqi Chen, Kai Zhang, Yang Liu, Xinkai Chen, Jiubin Tan
2025 J jnl
Data-Based Dynamic Decoupling Control for MIMO Precision Motion Stages With Position-Dependent Disturbances.
IEEE Trans Autom. Sci. Eng.
Kaixin Liu, Fazhi Song, Yue Dong, Yang Liu, Jiubin Tan
2025 J jnl
Precision Synchronous Control of Multiple Motion Systems: A Tube-Based MPC Approach.
IEEE CAA J. Autom. Sinica
Shuaiqi Chen, Fazhi Song, Yue Dong, Ning Cui, Yang Liu, Xinkai Chen
2025 J jnl
Prescribed-Time Consensus of Nonlinear Multi-Agent Systems by Dynamic Event-Triggered and Self-Triggered Protocol.
IEEE Trans Autom. Sci. Eng.
Meilin Li, Kai Zhang, Yang Liu, Fazhi Song, Tieshan Li
2024 J jnl
Consensus of Input Constrained Multi-Agent Systems by Dynamic Time-Varying Event-Triggered Strategy With a Designable Minimal Inter-Event Time.
IEEE Trans. Circuits Syst. II Express Briefs
Kai Zhang, Zhijian Hu, Fazhi Song, Xuefei Yang, Yang Liu
2024 J jnl
Motion Control of Wafer Scanners in Lithography Systems: From Setpoint Generation to Multistage Coordination.
IEEE Trans. Instrum. Meas.
Fazhi Song, Yang Liu, Yue Dong, Xinkai Chen, Jiubin Tan
2022 J jnl
Data-Driven Feedforward Learning With Force Ripple Compensation for Wafer Stages: A Variable-Gain Robust Approach.
IEEE Trans. Neural Networks Learn. Syst.
Fazhi Song, Yang Liu, Wen Jin, Jiubin Tan, Wei He
2022 J jnl
Learning Control for Motion Coordination in Wafer Scanners: Toward Gain Adaptation.
IEEE Trans. Ind. Electron.
Fazhi Song, Yang Liu, Dong Shen, Li Li, Jiubin Tan
2020 J jnl
Enhancing Accuracy and Numerical Stability for Repetitive Time-Varying System Identification: An Iterative Learning Approach.
IEEE Access
Fazhi Song, Yang Liu, Xianli Wang, Wen Jin, Li Li
2019 J jnl
Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables.
IEEE Trans. Ind. Electron.
Fazhi Song, Yang Liu, Jianxin Xu, Xiaofeng Yang, Qiao Zhu
2018 J jnl
Iterative Learning Identification and Compensation of Space-Periodic Disturbance in PMLSM Systems With Time Delay.
IEEE Trans. Ind. Electron.
Fazhi Song, Yang Liu, Jian-Xin Xu, Xiaofeng Yang, Ping He, Zhile Yang
2018 J jnl
Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage.
Complex.
Fazhi Song, Yang Liu, Jun Cao, Li Li, Jiubin Tan
2017 — conf
Iterative Learning Identification with Bias Compensation for Stochastic Linear Time-Varying Systems.
LSMS/ICSEE (2)
Fazhi Song, Yang Liu, Zhile Yang, Xiaofeng Yang, Ping He